Fundamentals of Semiconductor Manufacturing and Process Control
ISBN: 0471784060
Category: Technical
Tag: Science/Engineering
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Posted on 2007-06-06. By anonymous.
Description
ISBN: 0471784060
Title: Fundamentals of Semiconductor Manufacturing and Process Control
Author: Gary S. May Costas J. Spanos
Publisher: Wiley-IEEE Press
Publication Date: 2006-05-22
Number Of Pages: 463
Average Amazon Rating: 4.0
4.2 Mb pdf
A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. Following
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